25 nm pitch comparison between a traceable x-ray diffractometer and a metrological atomic force microscope

Author： Misumi Ichiko   Kitta Jun-ichiro   Fujimoto Hiroyuki   Gonda Satoshi   Azuma Yasushi   Maeda Keisuke   Kurosawa Tomizo   Ito Yoshiyasu   Omote Kazuhiko   Nakayama Yoshinori   Kawada Hiroki  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.23, Iss.1, 2012-01, pp. : 15002-15016

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