An imaging grating diffractometer for traceable calibration of grating pitch in the range 20 μm to 350 nm

Publisher： IOP Publishing

E-ISSN： 1742-6596|648|1|107-113

ISSN： 1742-6596

Source： Journal of Physics: Conference Series , Vol.648, Iss.1, 2015-10, pp. : 107-113

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