Simultaneous detection of particles and airflow with a MEMS piezoresistive cantilever

Author: Takahashi Hidetoshi   Kan Tetsuo   Matsumoto Kiyoshi   Shimoyama Isao  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.24, Iss.2, 2013-02, pp. : 25107-25113

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Abstract