Quantitative Boundary Support Characterization for Cantilever MEMS

Author： Rinaldi Gino   Packirisamy Muthukumaran   Stiharu Ion  

Publisher： MDPI

E-ISSN： 1424-8220|7|10|2062-2079

ISSN： 1424-8220

Source： Sensors, Vol.7, Iss.10, 2007-10, pp. : 2062-2079

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