Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation

Author： Azimi S   Breese M B H   Dang Z Y   Yan Y   Ow Y S   Bettiol A A  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.22, Iss.1, 2012-01, pp. : 15015-15023

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