Printed wax masks for 254 nm deep-UV pattering of PMMA-based microfluidics

Author: Fan Yiqiang   Liu Yang   Li Huawei   Foulds Ian G  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 27001-27004

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Abstract