Author: Lee Kook-Nyung Seo Yeong-Tai Lee Min-Ho Jung Suk-Won Kim Yong-Kweon Kim Jung-Mu
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.1, 2013-01, pp. : 15003-15009
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Abstract