A highly sensitive pressure sensor using a Au-patterned polydimethylsiloxane membrane for biosensing applications

Author： Liu Xinchuan   Zhu Yihao   Nomani Md W   Wen Xuejun   Hsia Tain-Yen   Koley Goutam  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25022-25031

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