Production of N and O atoms in flowing Ar–N2–O2 microwave discharges with separated N2 and O2 pulsed gases

Author: Bernardelli E A   Ricard A   Belmonte T  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.20, Iss.2, 2011-04, pp. : 25012-25017

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Abstract