Determination of N and O Atom Density in Ar-N 2-H 2 and Ar-O 2-H 2 Flowing Microwave Post Discharges

E-ISSN： 1286-4897|6|9|1205-1212

ISSN： 1155-4320

Source： Journal de Physique III, Vol.6, Iss.9, 1996-09, pp. : 1205-1212

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