Possibilities of determining non-Maxwellian EEDFs from the OES line-ratios in low-pressure capacitive and inductive plasmas containing argon and krypton

Author： Zhu Xi-Ming   Pu Yi-Kang   Celik Yusuf   Siepa Sarah   Schüngel Edmund   Luggenhölscher Dirk   Czarnetzki Uwe  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.21, Iss.2, 2012-04, pp. : 24003-24013

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