Ion energy distribution measurements in rf and pulsed dc plasma discharges

Author： Gahan D Daniels S Hayden C Scullin P O'Sullivan D Pei Y T Hopkins M B

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.21, Iss.2, 2012-04, pp. : 24004-24011

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Ion energy distributions in bipolar pulsed-dc discharges of methane measured at the biased cathode

By Corbella C Rubio-Roy M Bertran E Portal S Pascual E Polo M C Andújar J L

Plasma Sources Science and Technology, Vol. 20, Iss. 1, 2011-02 ,pp. : 15006-15013

IOP Publishing

Access to resources Recommend Favorite

Measurement of voltage and current in continuous and pulsed rf and dc glow discharges

Journal of Physics: Conference Series , Vol. 133, Iss. 1, 2008-10 ,pp. : 150-161

IOP Publishing

Access to resources Recommend Favorite

Plasma physics : ion energy in RF plasma etching

Journal de Physique Lettres, Vol. 40, Iss. 11, 1979-06 ,pp. : 223-225

Edp Sciences

Access to resources Recommend Favorite

Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O 2 discharges

By Liu Jia Zhang Quan-Zhi Liu Yong-Xin Gao Fei Wang You-Nian

Journal of Physics D: Applied Physics, Vol. 46, Iss. 23, 2013-06 ,pp. : 235202-235209

IOP Publishing

Access to resources Recommend Favorite

Spectroscopic measurements of phase-resolved electron energy distributionfunctions in RF-excited discharges

EPL (EUROPHYSICS LETTERS), Vol. 66, Iss. 2, 2004-04 ,pp. : 232-238

Edp Sciences

Access to resources Recommend Favorite