Author: Turner M.
Publisher: Springer Publishing Company
ISSN: 0011-4626
Source: Czechoslovak Journal of Physics, Vol.48, Iss.2, 1998-02, pp. : 59-69
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
A Numerical Method to Simulate Radio-Frequency Plasma Discharges
By Hammond E.P. Mahesh K. Moin P.
Journal of Computational Physics, Vol. 176, Iss. 2, 2002-03 ,pp. :
By Conti S. Porshnev P.I. Fridman A. Kennedy L.A. Grace J.M. Sieber K.D. Freeman D.R. Robinson K.S.
Experimental Thermal and Fluid Science, Vol. 24, Iss. 3, 2001-05 ,pp. :
CVD of hard DLC films in a radio frequency inductively coupled plasma source
By Yu S.J. Ding Z.F. Xu J. Zhang J.L. Ma T.C.
Thin Solid Films, Vol. 390, Iss. 1, 2001-06 ,pp. :