Study of the plasmas produced during the deposition of TiC/SiC thin films in a hybrid magnetron-laser system

Author: Novotný M.   Bulíř J.   Lančok J.   Jelínek M.   Zelinger Z.  

Publisher: Springer Publishing Company

ISSN: 0011-4626

Source: Czechoslovak Journal of Physics, Vol.56, Iss.4, 2006-04, pp. : 381-388

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Abstract