Novel silicon surface passivation by porous silicon combined with an ultrathin Al2O3 film

Author： Salem M.   Ben Rabha M.   Bessais B.   Elkhakani M.   Gaidi M.  

Publisher： Springer Publishing Company

ISSN： 0957-4522

Source： Journal of Materials Science: Materials in Electronics, Vol.24, Iss.12, 2013-12, pp. : 5035-5039

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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