Hydrogen plasma transport and deposition of films from a solid boron source

Author: Cross J.S.   Komatsu S.   Tanaka J.   Mieno M.   Suetsugu Y.   Sakaguchi J.   Moriyoshi Y.   Stephenson W.R.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.32, Iss.12, 1997-12, pp. : 3277-3282

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