Tilt-axis effect on oxidation behaviour and capacitance–voltage characteristics of (1 0 0) silicon

Author: Woo H.J.   Choi D.J.   Kim G.H.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.32, Iss.22, 1997-12, pp. : 6101-6106

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