Preferred growth of epitaxial TiN thin film on silicon substrate by pulsed laser deposition

Author: XU S   DU L   SUGIOKA K   TOYODA K   JYUMONJI M  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.33, Iss.7, 1998-04, pp. : 1777-1782

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