Crystalline silicon nitride thin films grown by pulsed YAG laser deposition

Author： Suda Y.   Ebihara K.   Baba K.   Abe H.   Grishin A.M.  

Publisher： Elsevier

ISSN： 0965-9773

Source： Nanostructured Materials, Vol.12, Iss.1, 1999-01, pp. : 391-394

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