Influence of sputtering atmosphere on crystallinity and crystal orientation of AlN thin films deposited on polycrystalline MoSi2 substrates

Author: Akiyama M   Xu C   Nonaka K   Hagio T   Nishimura S   Shobu K   Watanabe T  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.33, Iss.9, 1998-05, pp. : 2463-2467

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