Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering

Author: Alfonso J.   Buitrago J.   Torres J.   Marco J.   Santos B.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.45, Iss.20, 2010-10, pp. : 5528-5533

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