Reduction of dislocation density in GaN films on sapphire using AIN interlayers

Author： Chaudhuri J. George J.T. Kolske D.D. Wickenden A.E. Henry R.L. Rek Z.

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.37, Iss.7, 2002-04, pp. : 1449-1453

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