Characterisation of TiN and TiAlN thin films deposited on ground surfaces using focused ion beam milling

Author： Cairney J. M. Harris S. G. Ma L. W. Munroe P. R. Doyle E. D.

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.39, Iss.11, 2004-06, pp. : 3569-3575

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