Texture and sheet resistance of Al alloy thin films on Ti and TiN thin films

Author： Lee W-J. Kim S-J. Lee W. Lee Y-J. Lee Y-S. Rha S-K. Ook Park C.

ISSN： 0957-4522

Source： Journal of Materials Science: Materials in Electronics, Vol.15, Iss.1, 2004-01, pp. : 9-13

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