The structural deformations in the Si/SiGe system induced by thermal annealing

Author: Zheng Shuqi   Mori M.   Tambo T.   Tatsuyama C.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.42, Iss.14, 2007-07, pp. : 5312-5317

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Abstract