Three-dimensional observation of defects in nitrogen-doped 6H-SiC crystals using a laser scanning confocal microscope

Author: Lin Shenghuang   Chen Zhiming   Liu Sujuan   Yang Ying   Feng Xianfeng   Ba Yintu   Yang Mingchao   Yang Chen  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.47, Iss.7, 2012-04, pp. : 3429-3434

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