Subwavelength gratings fabricated on semiconductor substrates via E-beam lithography and lift-off method

Author： Sun Kien   Huang Shih-Chieh   Kechiantz Ara   Lee Chien-Ping  

Publisher： Springer Publishing Company

ISSN： 0306-8919

Source： Optical and Quantum Electronics, Vol.37, Iss.4, 2005-03, pp. : 425-432

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