Fabrication of high-efficiency multilayer-coated gratings for the EUV regime using e-beam patterned substrates

Author： Naulleau P.P.   Liddle J.A.   Anderson E.H.   Gullikson E.M.   Mirkarimi P.   Salmassi F.   Spiller E.  

Publisher： Elsevier

ISSN： 0030-4018

Source： Optics Communications, Vol.229, Iss.1, 2004-01, pp. : 109-116

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