Copper nitride films deposited by dc reactive magnetron sputtering

Author: Venkata Subba Reddy K.   Sivasankar Reddy A.   Sreedhara Reddy P.   Uthanna S.  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.18, Iss.10, 2007-10, pp. : 1003-1008

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