Effect of substrate on hydrogen in and out diffusion from a-Si:H thin films

Author: Rao R.   Kail F.   Roca i Cabarrocas P.  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.18, Iss.10, 2007-10, pp. : 1051-1056

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Abstract