Effects of Al content on the properties of ZnO:Al films prepared by Al2O3 and ZnO co-sputtering

Author: Deng Zhonghua   Huang Changgang   Huang Jiquan   Wang Meili   He Hong   Wang Hai   Cao Yongge  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.21, Iss.10, 2010-10, pp. : 1030-1035

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