LA ICP-MS in microelectronics failure analysis

Author: Pan Zixiao   Wei Wei   Li Fuhe  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.22, Iss.10, 2011-10, pp. : 1594-1601

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract