A Mass Spectral Investigation of the RF Plasmas of Small Organic Compounds: An Investigation of the Plasma-Phase Reactions in the Plasma Deposition from Allyl Amine

Author： Beck Alison J.   Candan Sennur   France Richard M.   Jones Frank R.   Short Robert D.  

Publisher： Springer Publishing Company

ISSN： 1084-0184

Source： Plasmas and Polymers, Vol.3, Iss.2, 1998-06, pp. : 97-114

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