Nanostructured TiO x film on Si substrate: room temperature formation of TiSi x nanoclusters

Author: Chiodi Mirco   Cavaliere Emanuele   Kholmanov Iskandar   Simone Monica   Sakho Oumar   Cepek Cinzia   Gavioli Luca  

Publisher: Springer Publishing Company

ISSN: 1388-0764

Source: Journal of Nanoparticle Research, Vol.12, Iss.7, 2010-09, pp. : 2645-2653

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