Synthesis of nanocomposite thin films based on the Mo-Si-C ternary system and compositional tailoring through controlled ion bombardment

Author： Govindarajan S.   Moore J.   Disam J.  

Publisher： Springer Publishing Company

ISSN： 1543-1940

Source： Metallurgical and Materials Transactions A, Vol.29, Iss.6, 1998-06, pp. : 1719-1725

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