Synthesis and characterization of Ti-Si-C-N films

Author: Shtansky D.   Levashov E.   Sheveiko A.   Moore J.  

Publisher: Springer Publishing Company

ISSN: 1543-1940

Source: Metallurgical and Materials Transactions A, Vol.30, Iss.9, 1999-09, pp. : 2439-2447

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