Synthesis and characterization of highly c-textured Al(1-x)Sc(x)N thin films in view of telecom applications

Publisher： IOP Publishing

ISSN： 1757-899X

Source： IOP Conference Series: Materials Science and Engineering, Vol.41, Iss.1, 2012-12, pp. : 75-78

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Synthesis and characterization of Ti-Si-C-N films

By Shtansky D.   Levashov E.   Sheveiko A.   Moore J.  

Metallurgical and Materials Transactions A, Vol. 30, Iss. 9, 1999-09 ,pp. : 2439-2447

Springer Publishing Company

Access to resources Recommend Favorite

X-ray diffraction study of cubic-phase AlN thin films grown on sapphire(0001) substrates by pulsed laser deposition

By  

IOP Conference Series: Materials Science and Engineering, Vol. 24, Iss. 1, 2011-09 ,pp. : 123-128

IOP Publishing

Access to resources Recommend Favorite

Improvement of Structural, Morphological and Mechanical Properties of CrNx Sputtered Thin Films by Vacuum Annealing Process

By  

Key Engineering Materials, Vol. 2017, Iss. 751, 2017-09 ,pp. : 113-118

Trans Tech Publications

Access to resources Recommend Favorite

Synthesis and characterization of mesoporous zirconium oxide thin films

By  

IOP Conference Series: Materials Science and Engineering, Vol. 12, Iss. 1, 2010-06 ,pp. : 81-84

IOP Publishing

Access to resources Recommend Favorite

Structural and Magnetic Properties of Annealed Vapor Deposited CoxCr1-x Thin Films

By  

Solid State Phenomena, Vol. 2015, Iss. 233, 2015-07 ,pp. : 709-712

Trans Tech Publications

Access to resources Recommend Favorite