Piezoelectric Aluminum Nitride Films Deposited by Triode Sputtering for Surface Acoustic Wave Devices

Author： Assouar M. B.   Elmazria O.   Mortet V.   Jouan P.- Y.   Djouadi M. A.   Alnot P.  

Publisher： Taylor & Francis Ltd

ISSN： 0015-0193

Source： Ferroelectrics, Vol.273, Iss.1, 2002-01, pp. : 249-254

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