Stress Measurements of Pt/PZT/Pt Thin-Film Stack on Oxidized Silicon Substrate for Micro-Actuator

Author： Ichiki Masaaki   Maeda Ryutaro   Zhang Lulu  

Publisher： Taylor & Francis Ltd

ISSN： 0015-0193

Source： Ferroelectrics, Vol.273, Iss.1, 2002-01, pp. : 83-88

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