Fabrication of Ferroelectric Microstructures by Electron-Beam-Induced Patterning Process

Author： Fujii Tadashi   Kawachi Tomoyasu   Adachi Masatoshi  

Publisher： Taylor & Francis Ltd

ISSN： 0015-0193

Source： Ferroelectrics, Vol.406, Iss.1, 2010-01, pp. : 16-23

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