The Structure and Characterization of ZrO2 Thin Films Prepared by Liquid Delivery-MOCVD

Author： Li Rui   Xie Dan   Zhang Mingming   Han Xueguang   Lin Huiwang   Ren Tianling   Liu Litian  

Publisher： Taylor & Francis Ltd

ISSN： 0015-0193

Source： Ferroelectrics, Vol.407, Iss.1, 2010-01, pp. : 140-145

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

(Pb1−xBax)TiO3 Thin Films Prepared by Liquid Delivery MOCVD: Influence of the Process Parameters on Film Formation and Electrical Properties

By Ritter S.   Hoffmann-Eifert S.   Bolten D.   Waser R.  

Ferroelectrics, Vol. 268, Iss. 1, 2002-01 ,pp. : 143-148

Taylor & Francis Ltd

Access to resources Recommend Favorite

Preparation and characterization of HfO$_{2}$ thin films byphoto-assisted MOCVD

By  

Le Journal de Physique IV, Vol. 132, Iss. issue, 2006-03 ,pp. : 279-283

Edp Sciences

Access to resources Recommend Favorite

Characterization of ZrO2 and (ZrO2)x(Al2O3)1−X thin films on Si substrates: effect of the Al2O3 component

By  

Journal of Physics: Conference Series , Vol. 514, Iss. 1, 2014-05 ,pp. : 55-59

IOP Publishing

Access to resources Recommend Favorite

Preparation of PLZT Antiferroelectric Thin Films on ZrO2 Buffered Substrates

By Hao Xihong   Zhai Jiwei   Xu Jinbao   Yao Xi  

Ferroelectrics, Vol. 357, Iss. 1, 2007-01 ,pp. : 253-258

Taylor & Francis Ltd

Access to resources Recommend Favorite

Structural properties of epitaxial YSZ and doped CeO2 films on different substrates prepared by liquid sources MOCVD (LSMOCVD)

By  

Le Journal de Physique IV, Vol. 10, Iss. PR2, 2000-02 ,pp. : Pr2-27-Pr2-33

Edp Sciences

Access to resources Recommend Favorite