Sputtering of SiC with low energy He and Ar ions under grazing incidence

Author: Kosiba R.   Ecke G.   Ambacher O.   Menyhard M.  

Publisher: Taylor & Francis Ltd

ISSN: 1042-0150

Source: Radiation Effects and Defects in Solids, Vol.158, Iss.10, 2003-10, pp. : 721-730

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Abstract