Formation of nanometer-scale structures in SiO2 thin films by means of MeV-ion irradiation

Author: Cheang-Wong Juan-Carlos  

Publisher: Taylor & Francis Ltd

ISSN: 1042-0150

Source: Radiation Effects and Defects in Solids, Vol.162, Iss.3-4, 2007-03, pp. : 247-258

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Abstract