Method of ions acceleration for laser-induced implantation of semiconductor materials

Author: Czarnecka A.   Badziak J.   Parys P.   Rosinski M.   Wołowski J.  

Publisher: Taylor & Francis Ltd

ISSN: 1042-0150

Source: Radiation Effects and Defects in Solids, Vol.163, Iss.4-6, 2008-04, pp. : 389-394

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Abstract