Effects of Deposition Pressure on the Microstructure and Hardness of Ti/TiN Nanolayered Coatings

Author： Bai Xiaoming   Zhang Chengshun   She Hui   Li Chunping   Yu Huamin  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.145, Iss.1, 2013-01, pp. : 32-39

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