Investigation of Alumina Barrier Layer for FeRAM Prepared by rf Magnetron Sputtering Method

Author： Jimbo Takehito Miyaguchi Yuusuke Kikuchi Shin Kimura Isao Tanimura Michio Suu Koukou Ishikawa Michio

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.45, Iss.1, 2002-01, pp. : 105-112

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