Low-Leakage Epitaxial PZT Thin Films Grown on Ir/MgO Substrates by Metalorganic Chemical Vapor Deposition

Author: Oikawa T.   Takahashi K.   Ishida J.   Ichikawa Y.   Ochiai T.   Saito K.   Sawabe A.   Funakubo H.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.46, Iss.1, 2002-01, pp. : 55-64

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