Uniformity of PZT Thin Films Prepared by MOCVD on 8"&phis; Substrate

Author： Masuda Takeshi   Kajinuma Masahiko   Yamada Takakazu   Uchida Hiroto   Uematsu Masaki   Suu Koukou   Ishikawa Michio  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.46, Iss.1, 2002-01, pp. : 65-77

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