Uniformity of PZT Thin Films Prepared by MOCVD on 8"&phis; Substrate

Author: Masuda Takeshi   Kajinuma Masahiko   Yamada Takakazu   Uchida Hiroto   Uematsu Masaki   Suu Koukou   Ishikawa Michio  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.46, Iss.1, 2002-01, pp. : 65-77

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Abstract