Fabrication of (100) Orientated PZT Thin Films for MEMS Applications

Author: Zhao Hong-Jin   Ren Tian-Ling   Liu Jian-She   Liu Li-Tian   Li Zhi-Jian  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.46, Iss.1, 2002-01, pp. : 79-86

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Abstract